Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas
In the present study, spatial distributions of relative Ti atom and Tit ion densities in magnetron sputtering plasmas have been measured using twodimensional laser-induced fluorescence (LIF) imaging spectroscopy. Then, the absolute densities of Ti atoms and Tit ions were evaluated using ultraviolet...
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| Format: | Article |
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| Online Access: | http://eprints.uthm.edu.my/2473/ http://eprints.uthm.edu.my/2473/1/Comparison_between_Ti_atoms%2C_Ti_Ions_and_Ar.pdf |