Optical emission spectroscopy analysis during the growth of TiO2 thin film in magnetron sputtering discharge
Titanium dioxide (TiO2) thin film has been studied by many researchers due to its wide potential application in photonic devices. Ti02 thin film has been growth using various techniques such as sol-gel and sputtering deposition. One of the most promising technique to growth an advanced Ti02 thin fil...
| Main Authors: | , |
|---|---|
| Format: | Other |
| Published: |
Materials Research Society, Singapore
2011
|
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/6058/ http://eprints.uthm.edu.my/6058/1/Optical_Emission_Spectroscopy_Analysis_During_the_Growth.pdf |