Deposition of a carbon nanocomposite film using magnetron sputtering
A conventional magnetron sputtering system was used for depositing a conductive nanocomposite film which consisted of diamond-like carbon (DLC) and carbon nanoparticles. The synthesis process was composed of three steps. The first step was the deposition of carbon nanoparticles, which was realized b...
| Main Authors: | , , , |
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| Format: | Article |
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/2474/ http://eprints.uthm.edu.my/2474/1/Deposition_of_a_Carbon_Nanocomposite_Film.pdf |