Influence of the oxygen flow rate on the plasma parameters in reactive magnetron sputtering plasma using Zn target
Aluminum-doped zinc oxide (AZO) and zinc oxide (ZnO) are promising materials which have been investigated for photovoltaic and photosensor applications. The applications of ZnO based thin films are due to several unique material properties where it is a II-IV semiconductor with a wide direct bandg...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/6140/ http://eprints.uthm.edu.my/6140/1/Influence_of_the_oxygen_flow_rate_on_the_plasma.pdf |