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Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas

Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas

by Nayan, Nafarizal, Koichi, Sasaki

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2

Sticking probabilities of Cu, Zn, Sn, and S atoms in magnetron sputtering plasmas employing a Cu2ZnSnS4 stoichiometric target

Sticking probabilities of Cu, Zn, Sn, and S atoms in magnetron sputtering plasmas employing a Cu2ZnSnS4 stoichiometric target

by Nayan, Nafarizal, Sunya, Kikuchi, Koichi, Sasaki
Published 2015

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