Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas
In the present study, spatial distributions of relative Ti atom and Tit ion densities in magnetron sputtering plasmas have been measured using twodimensional laser-induced fluorescence (LIF) imaging spectroscopy. Then, the absolute densities of Ti atoms and Tit ions were evaluated using ultraviolet...
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| Format: | Article |
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| Online Access: | http://eprints.uthm.edu.my/2473/ http://eprints.uthm.edu.my/2473/1/Comparison_between_Ti_atoms%2C_Ti_Ions_and_Ar.pdf |
| Summary: | In the present study, spatial distributions of relative Ti atom and Tit ion
densities in magnetron sputtering plasmas have been measured using twodimensional
laser-induced fluorescence (LIF) imaging spectroscopy. Then, the
absolute densities of Ti atoms and Tit ions were evaluated using ultraviolet
absorption (UVAS) spectroscopy. Spatial distributions of absolute density Ti atom
and Ti* ion were determined by comparing the UVAS results with the results of
spatial distribution by LIF spectroscopy. Ionization mechanisms of Ti were discussed
from the experimental results. It was found that the ionization of Ti enhanced with
the discharge gas pressure. In addition, the spatial distribution of Ar atom density at
metastable state was also measured using LIF and it was compared with the density
distributions of Ti* ions. The contribution of Penning ionization was discussed from
the spatial distributions of Ar atom at metastable state. |
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