Temporal variations of radiative Ti, Ti* and Ar densities in pulsed-modulated rf magnetron sputtering plasmas
The temporal variations of the optical emission intensities of Ti, Ti*, and Ar were measured in pulse-modulated rf magnetron sputtering plasmas. The relationship between the production of Ti' and the radiative Ti, Ti*, and Ar densities in sputtering plasmas was discussed. We found that the inte...
| Main Authors: | , , |
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| Format: | Article |
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/2457/ http://eprints.uthm.edu.my/2457/1/Temporal_variations_of_radiative_Ti%2C_Ti_and_Ar.pdf |