Characterization and optimization of metal and metal oxide thin films fabricated by high-pressure magnetron sputtering deposition technique
Thin film technology is now a sophisticated and advanced technology. Thin film is used to fabricate many products such as ultra large scale integrated (ULSI) circuit, sensor devices, optical films and protective coating. The applications of thin films is depend on film properties such as film thickn...
| Main Authors: | , , , , |
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| Format: | Thesis |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/2873/ http://eprints.uthm.edu.my/2873/1/FRGS_0703.pdf |