Characterization of TiAlBN nanocomposite coating deposited via radio frequency magnetron sputtering using single hot-pressed target
TiAlBN coatings have been deposited at varying bias voltage of 0, -60, and -150 V by radio frequency (RF) magnetron sputtering technique. A single hot-pressed Ti-Al-BN target was used for the deposition process. With glancing angle X-ray diffraction analysis (GAXRD), the nanocrystalline (nc-) (Ti,Al...
| Main Authors: | , , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2012
|
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/3483/ http://eprints.uthm.edu.my/3483/1/Characterization_of_TiAlBN_Nanocomposite_Coating_deposited_via.pdf |