High figure of merit of the post-annealed Ti/Al/ITO transparent conductive contacts sputter deposited on n-GaN

High figure of merit of the post-annealed Ti/Al/ITO transparent conductive contacts sputter deposited on n-GaN

This paper reports on the enhanced electrical and optical characteristics of Ti/Al/ITO transparent conductive contacts (TCC) deposited on n-GaN for light emitting device applications. Ti/Al thin metal layer was inserted under the top ITO transparent conductive oxides (TCO) in order to improve the el...

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Bibliographic Details
Main Authors:	Ali, Ahmad Hadi, Hassan, Zainuriah, Shuhaimi, Ahmad
Format:	Article
Published:	Elsevier 2016
Subjects:	TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/8483/

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