Design and simulation of mass-spring-dashpot system for RFMEMS switch
Design and analysis the structure of the mass-springdashpot of the RFMEMS switch are presented in this work. Most familiar method applies in designing MEMS switch is the spring design with difference length and width. These two parameters affect the capability of the spring to support the mass durin...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/4770/ http://eprints.uthm.edu.my/4770/1/Design_and_Simulation.pdf |