Structural and optical properties of the nc-Si:H thin films irradiated by high energetic ion beams

Structural and optical properties of the nc-Si:H thin films irradiated by high energetic ion beams

Hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by radio-frequency plasma enhanced chemical vapour deposition was irradiated by an energetic ion beam source from a 3.3 kJ Mather type dense plasma focus device. The effects of the energetic ion beam irradiations on the structural a...

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Bibliographic Details
Main Authors:	Goh, Boon Tong, Ngoi, Siew Kien, Yap, S.L., Wong, C.S., Dee, Chang Fu, Rahman, Saadah Abdul
Format:	Article
Published:	2013
Subjects:	QC Physics
Online Access:	http://eprints.um.edu.my/7377/

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