Effects of silane flow-rate on the structural properties of a-Si:H thin films deposited by d.c. and pulsed PECVD
A pulsed PECVD system was developed from a modification of the existing d.c. PECVD system with a modulation frequency of 10KHz. In this work, the effects of silane flow-rate on the structural properties of films prepared by both techniques were investigated. These films were analysed using X-ray dif...
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| Format: | Article |
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2004
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| Online Access: | http://eprints.um.edu.my/7350/ http://eprints.um.edu.my/7350/1/Effects_of_silane_flow%2Drate_on_the_structural_properties_of_a%2DSiH_thin_films_deposited_by_d.c._and_pulsed_PECVD.pdf |