Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films

This work presents a study on the structural properties of hydrogenated amorphous silicon (a-Si:H) prepared by pulsed plasma enhanced chemical vapour deposition (PECVD) technique using Raman and infrared spectroscopy. The bonded hydrogen content and hydrogen bonding configurations in the a-Si:H film...

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Main Authors:	Boon, T.G., Rahman, A.S.
Format:	Article
Published:	2007
Subjects:	QC Physics
Online Access:	http://eprints.um.edu.my/7362/ http://eprints.um.edu.my/7362/1/Infrared_and_Raman_Spectroscopy_Studies_on_Pulsed_PECVD_a%2DSiH_Films.pdf

id	um-7362
recordtype	eprints
spelling	um-73622013-09-23T01:20:28Z Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films Boon, T.G. Rahman, A.S. QC Physics This work presents a study on the structural properties of hydrogenated amorphous silicon (a-Si:H) prepared by pulsed plasma enhanced chemical vapour deposition (PECVD) technique using Raman and infrared spectroscopy. The bonded hydrogen content and hydrogen bonding configurations in the a-Si:H film s were investigated from the Fourier transform infrared (FTIR) spectra of the film s. The Raman spectra of the films have been used to obtain evidence of nanocrystallinity in the films. The dependence of silane flow-rates and discharge power on these properties was investigated. Increase in the discharge power resulted in films with lower hydrogen content and increase the dihydride bond concentration. Nanocrystallinity was observed in films prepared at low discharge power at all silane flow-rates but increase in discharge power resulted in films with purely amorphous structure. 2007 Article PeerReviewed application/pdf http://eprints.um.edu.my/7362/1/Infrared_and_Raman_Spectroscopy_Studies_on_Pulsed_PECVD_a%2DSiH_Films.pdf Boon, T.G.; Rahman, A.S. (2007) Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films. Solid State Science and Technology <http://eprints.um.edu.my/view/publication/Solid_State_Science_and_Technology.html>, 15 (2). pp. 153-160. ISSN 0128-7389 http://eprints.um.edu.my/7362/
repository_type	Digital Repository
institution_category	Local University
institution	University Malaya
building	UM Research Repository
collection	Online Access
topic	QC Physics
spellingShingle	QC Physics Boon, T.G. Rahman, A.S. Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
description	This work presents a study on the structural properties of hydrogenated amorphous silicon (a-Si:H) prepared by pulsed plasma enhanced chemical vapour deposition (PECVD) technique using Raman and infrared spectroscopy. The bonded hydrogen content and hydrogen bonding configurations in the a-Si:H film s were investigated from the Fourier transform infrared (FTIR) spectra of the film s. The Raman spectra of the films have been used to obtain evidence of nanocrystallinity in the films. The dependence of silane flow-rates and discharge power on these properties was investigated. Increase in the discharge power resulted in films with lower hydrogen content and increase the dihydride bond concentration. Nanocrystallinity was observed in films prepared at low discharge power at all silane flow-rates but increase in discharge power resulted in films with purely amorphous structure.
format	Article
author	Boon, T.G. Rahman, A.S.
author_facet	Boon, T.G. Rahman, A.S.
author_sort	Boon, T.G.
title	Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
title_short	Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
title_full	Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
title_fullStr	Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
title_full_unstemmed	Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films
title_sort	infrared and raman spectroscopy studies on pulsed pecvd a-si:h films
publishDate	2007
url	http://eprints.um.edu.my/7362/ http://eprints.um.edu.my/7362/1/Infrared_and_Raman_Spectroscopy_Studies_on_Pulsed_PECVD_a%2DSiH_Films.pdf
first_indexed	2018-09-06T05:25:48Z
last_indexed	2018-09-06T05:25:48Z
_version_	1610834561214709760

Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H Films

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