Infrared and raman spectroscopy studies on pulsed PECVD a-Si:H films
This work presents a study on the structural properties of hydrogenated amorphous silicon (a-Si:H) prepared by pulsed plasma enhanced chemical vapour deposition (PECVD) technique using Raman and infrared spectroscopy. The bonded hydrogen content and hydrogen bonding configurations in the a-Si:H film...
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| Format: | Journal |
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Solid State Science and Technology, Persatuan Sains dan Teknologi Keadaan Pepejal Malaysia
2007
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| Online Access: | http://www.myjurnal.my/public/article-view.php?id=16903 |