Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...
| Main Authors: | , , , , , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
MDPI
2015
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610594/ |