A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists o...

Full description

Bibliographic Details
Main Authors: Tan, Qiulin, Li, Chen, Xiong, Jijun, Jia, Pinggang, Zhang, Wendong, Liu, Jun, Xue, Chenyang, Hong, Yingping, Ren, Zhong, Luo, Tao
Format: Online
Language:English
Published: Molecular Diversity Preservation International (MDPI) 2014
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3958212/