A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists o...
Main Authors: | , , , , , , , , , |
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Format: | Online |
Language: | English |
Published: |
Molecular Diversity Preservation International (MDPI)
2014
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Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3958212/ |