A Spherically-Shaped PZT Thin Film Ultrasonic Transducer with an Acoustic Impedance Gradient Matching Layer Based on a Micromachined Periodically Structured Flexible Substrate
This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a...
| Main Authors: | , |
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| Format: | Online |
| Language: | English |
| Published: |
Molecular Diversity Preservation International (MDPI)
2013
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859077/ |