Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...

Full description

Bibliographic Details
Main Authors: Song, Jinlong, Xue, Chenyang, He, Changde, Zhang, Rui, Mu, Linfeng, Cui, Juan, Miao, Jing, Liu, Yuan, Zhang, Wendong
Format: Online
Language:English
Published: MDPI 2015
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610594/

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4610594/

Similar Items