Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD
With an appropriate high anneal temperature under H2 atmosphere, GaN quantum dots (QDs) have been fabricated via GaN thermal decomposition in metal organic chemical vapor deposition (MOCVD). Based on the characterization of atomic force microscopy (AFM), the obtained GaN QDs show good size distribut...
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pubmed-41284462014-08-18 Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD Zhang, Jin Li, Senlin Xiong, Hui Tian, Wu Li, Yang Fang, Yanyan Wu, Zhihao Dai, Jiangnan Xu, Jintong Li, Xiangyang Chen, Changqing Nano Express With an appropriate high anneal temperature under H2 atmosphere, GaN quantum dots (QDs) have been fabricated via GaN thermal decomposition in metal organic chemical vapor deposition (MOCVD). Based on the characterization of atomic force microscopy (AFM), the obtained GaN QDs show good size distribution and have a low density of 2.4 × 108 cm-2. X-ray photoelectron spectroscopy (XPS) analysis demonstrates that the GaN QDs were formed without Ga droplets by thermal decomposition of GaN. Springer 2014-07-09 /pmc/articles/PMC4128446/ /pubmed/25136276 http://dx.doi.org/10.1186/1556-276X-9-341 Text en Copyright © 2014 Zhang et al.; licensee Springer. http://creativecommons.org/licenses/by/4.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited. |
repository_type |
Open Access Journal |
institution_category |
Foreign Institution |
institution |
US National Center for Biotechnology Information |
building |
NCBI PubMed |
collection |
Online Access |
language |
English |
format |
Online |
author |
Zhang, Jin Li, Senlin Xiong, Hui Tian, Wu Li, Yang Fang, Yanyan Wu, Zhihao Dai, Jiangnan Xu, Jintong Li, Xiangyang Chen, Changqing |
spellingShingle |
Zhang, Jin Li, Senlin Xiong, Hui Tian, Wu Li, Yang Fang, Yanyan Wu, Zhihao Dai, Jiangnan Xu, Jintong Li, Xiangyang Chen, Changqing Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
author_facet |
Zhang, Jin Li, Senlin Xiong, Hui Tian, Wu Li, Yang Fang, Yanyan Wu, Zhihao Dai, Jiangnan Xu, Jintong Li, Xiangyang Chen, Changqing |
author_sort |
Zhang, Jin |
title |
Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
title_short |
Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
title_full |
Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
title_fullStr |
Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
title_full_unstemmed |
Fabrication of low-density GaN/AlN quantum dots via GaN thermal decomposition in MOCVD |
title_sort |
fabrication of low-density gan/aln quantum dots via gan thermal decomposition in mocvd |
description |
With an appropriate high anneal temperature under H2 atmosphere, GaN quantum dots (QDs) have been fabricated via GaN thermal decomposition in metal organic chemical vapor deposition (MOCVD). Based on the characterization of atomic force microscopy (AFM), the obtained GaN QDs show good size distribution and have a low density of 2.4 × 108 cm-2. X-ray photoelectron spectroscopy (XPS) analysis demonstrates that the GaN QDs were formed without Ga droplets by thermal decomposition of GaN. |
publisher |
Springer |
publishDate |
2014 |
url |
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4128446/ |
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1613122997861744640 |