Influence of stress in GaN crystals grown by HVPE on MOCVD-GaN/6H-SiC substrate
GaN crystals without cracks were successfully grown on a MOCVD-GaN/6H-SiC (MGS) substrate with a low V/III ratio of 20 at initial growth. With a high V/III ratio of 80 at initial growth, opaque GaN polycrystals were obtained. The structural analysis and optical characterization reveal that stress ha...
Main Authors: | , , , , , , , |
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Format: | Online |
Language: | English |
Published: |
Nature Publishing Group
2014
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Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3935196/ |