Growth condition dependence of unintentional oxygen incorporation in epitaxial GaN
Growth conditions have a tremendous impact on the unintentional background impurity concentration in gallium nitride (GaN) synthesized by molecular beam epitaxy and its resulting chemical and physical properties. In particular for oxygen identified as the dominant background impurity we demonstrate...
| Main Authors: | , , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Taylor & Francis
2016
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5101906/ |