Effects of silane flow-rate on the structural properties of aSi:H thin films deposited by d.c. and pulsed PECVD
A pulsed PECVD system was developed from a modification of the existing d.c. PECVD system with a modulation frequency of 10KHz. In this work, the effects of silane flow-rate on the structural properties of films prepared by both techniques were investigated. These films were analysed using X-ray dif...
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Solid State Science and Technology, Persatuan Sains dan Teknologi Keadaan Pepejal Malaysia
2004
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| Online Access: | http://www.myjurnal.my/public/article-view.php?id=81772 |