An experimental study on precision grinding of silicon using diamond grinding pins
Silicon substrates are difficult to grind to good surface finishes using conventional machining. Ductile mode machining is often required to have flawless machining but this requires the use of expensive machine tools. However, precision grinding using conventional machine tools could generate large...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Inderscience Enterprises Ltd.
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/ http://irep.iium.edu.my/7723/1/IJMatEI0203-0410_ALAO.pdf |