Geometrical integrity of microholes produced by micro-EDM

Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, et...

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Main Author: Ali, Mohammad Yeakub
Format: Monograph
Language:English
Published: Research Management Center, IIUM 2008
Subjects:
Online Access:http://irep.iium.edu.my/28924/
http://irep.iium.edu.my/28924/
http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf
id iium-28924
recordtype eprints
spelling iium-289242013-09-02T07:29:39Z http://irep.iium.edu.my/28924/ Geometrical integrity of microholes produced by micro-EDM Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, etc. influence the fluid flow inside the channels. This project (EDW-17) was followed by project of EDW-18, where EDM micro drilling process was developed. In this research project the high aspect ratio EDM drilled micro holes were measured and investigated. At first, an experimental process was developed to open the internal geometry of the holes and then characterized the geometrical integrity and surface texture using scanning electron microscope (SEM) and atomic force microscope (AFM). Research Management Center, IIUM 2008-01 Monograph NonPeerReviewed application/pdf en http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf Ali, Mohammad Yeakub (2008) Geometrical integrity of microholes produced by micro-EDM. Research Report. Research Management Center, IIUM, Kuala Lumpur. (Unpublished) EDW A06-17
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Geometrical integrity of microholes produced by micro-EDM
description Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, etc. influence the fluid flow inside the channels. This project (EDW-17) was followed by project of EDW-18, where EDM micro drilling process was developed. In this research project the high aspect ratio EDM drilled micro holes were measured and investigated. At first, an experimental process was developed to open the internal geometry of the holes and then characterized the geometrical integrity and surface texture using scanning electron microscope (SEM) and atomic force microscope (AFM).
format Monograph
author Ali, Mohammad Yeakub
author_facet Ali, Mohammad Yeakub
author_sort Ali, Mohammad Yeakub
title Geometrical integrity of microholes produced by micro-EDM
title_short Geometrical integrity of microholes produced by micro-EDM
title_full Geometrical integrity of microholes produced by micro-EDM
title_fullStr Geometrical integrity of microholes produced by micro-EDM
title_full_unstemmed Geometrical integrity of microholes produced by micro-EDM
title_sort geometrical integrity of microholes produced by micro-edm
publisher Research Management Center, IIUM
publishDate 2008
url http://irep.iium.edu.my/28924/
http://irep.iium.edu.my/28924/
http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf
first_indexed 2018-09-07T05:09:04Z
last_indexed 2018-09-07T05:09:04Z
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