Geometrical integrity of microholes produced by micro-EDM
Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, et...
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| Format: | Monograph |
| Language: | English |
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Research Management Center, IIUM
2008
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| Online Access: | http://irep.iium.edu.my/28924/ http://irep.iium.edu.my/28924/ http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf |
| Summary: | Although there are many techniques for the fabrication of micro-hole for Bio-MEMS
and microfludic applications, characterization of high aspect ratio (depth/diameter)
micro-hole is a critical issue among the researchers worldwide. The characteristics
such as surface finish, vertical side wall, etc. influence the fluid flow inside the
channels. This project (EDW-17) was followed by project of EDW-18, where EDM
micro drilling process was developed. In this research project the high aspect ratio
EDM drilled micro holes were measured and investigated. At first, an experimental
process was developed to open the internal geometry of the holes and then
characterized the geometrical integrity and surface texture using scanning electron
microscope (SEM) and atomic force microscope (AFM). |
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