Investigation of Microholes Produced by Focused Ion Beam Micromachining
This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Book Chapter |
| Language: | English |
| Published: |
Department of Manufacturing and Materials,Kulliyyah of Engineering, IIUM
2010
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/2517/ http://irep.iium.edu.my/2517/1/RMC_Book_Chapter_Investigation_uHole.pdf |