Micromilling of tungsten carbide using focused ion beam
This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten...
Main Authors: | Ali, Mohammad Yeakub, Ong, A. S., Konneh, Mohamed |
---|---|
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2005
|
Subjects: | |
Online Access: | http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf |
Similar Items
-
Noble tool based micromilling for nanometric surface finish
by: Ali, Mohammad Yeakub
Published: (2011) -
Focused ion beam micromachining of mems
by: Ali, Mohammad Yeakub
Published: (2008) -
Application of focused ion beam for machining of nanopillar sheet
by: Ali, Mohammad Yeakub
Published: (2011) -
Minimum chip thickness in machining MEMS structure using Tool Based Micromilling
by: Ali, Mohammad Yeakub, et al.
Published: (2011) -
Fabrication of Bio-MEMS Nanostructure by focused ion beam
by: Ali, Mohammad Yeakub, et al.
Published: (2010)