Micromilling of tungsten carbide using focused ion beam
This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten...
Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2005
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Subjects: | |
Online Access: | http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/ http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf |