Production, characterization and application of silicon-on-sapphire wafers
Silicon-on-sapphire (SOS) thin film systems have had specific electronic applications because they can reduce noise and current leakage in metal oxide semiconductor transistors. However, there are some issues in producing defect-free SOS wafers. Dislocations, misfit, micro twins and residual stresse...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Trans Tech Publications
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/20.500.11937/25303 |