A modified layer-removal method for residual stress measurement in electrodeposited nickel films
Combining the traditional layer-removal method with a cantilever beam model, a modified layer-removal method is developed and used to measure residual stress in single and multi-layer electrodeposited nickel films with thickness of 2.5 μm. The out-of-plane displacement of the free tip of a cantileve...
Main Authors: | , , , , , , |
---|---|
Format: | Journal Article |
Published: |
Elsevier Science SA
2011
|
Subjects: | |
Online Access: | http://hdl.handle.net/20.500.11937/18476 |