Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application
In this simulation research work, the metal-composite-metal (MCM) multilayer capacitor structure [Pt/BST/Ni-Fe/Cu] is proposed with Barium Strontium Titanate (BST) oxide material as the capacitor dielectric material for DRAM with permalloy Nickel-Ferrous (Ni-Fe) coated Copper (Cu) as the bottom cond...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2006
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| Online Access: | http://shdl.mmu.edu.my/2051/ |
| _version_ | 1848789950833623040 |
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| author | Balachandran, R Yow, HK Manickam, RM Saaminathan, V |
| author_facet | Balachandran, R Yow, HK Manickam, RM Saaminathan, V |
| author_sort | Balachandran, R |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | In this simulation research work, the metal-composite-metal (MCM) multilayer capacitor structure [Pt/BST/Ni-Fe/Cu] is proposed with Barium Strontium Titanate (BST) oxide material as the capacitor dielectric material for DRAM with permalloy Nickel-Ferrous (Ni-Fe) coated Copper (Cu) as the bottom conducting electrode and platinum as the top conducting electrode. This proposed MCM consists of 120 pin Cu bottom contact material, a I pm of Ni-Fe alloy over the stoichiometric composition of the BST oxide dielectric material of thickness 40 nm and dielectric constant of 775. The MCM structure is expected to deliver a maximum charge storage capacity of 109.75 fF for a capacitor in DRAM cell area of 0.64 mu m(2) well above the minimum requirement for DRAM cell. The leakage current density for a variation of voltage from 0 to 10 V has been simulated for temperature variation. When compared with the previous report, the proposed multi layer capacitor (MLC) structure shows promising potentials in terms of dielectric characteristics. |
| first_indexed | 2025-11-14T18:04:52Z |
| format | Conference or Workshop Item |
| id | mmu-2051 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:04:52Z |
| publishDate | 2006 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-20512011-08-10T06:30:33Z http://shdl.mmu.edu.my/2051/ Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application Balachandran, R Yow, HK Manickam, RM Saaminathan, V TA Engineering (General). Civil engineering (General) In this simulation research work, the metal-composite-metal (MCM) multilayer capacitor structure [Pt/BST/Ni-Fe/Cu] is proposed with Barium Strontium Titanate (BST) oxide material as the capacitor dielectric material for DRAM with permalloy Nickel-Ferrous (Ni-Fe) coated Copper (Cu) as the bottom conducting electrode and platinum as the top conducting electrode. This proposed MCM consists of 120 pin Cu bottom contact material, a I pm of Ni-Fe alloy over the stoichiometric composition of the BST oxide dielectric material of thickness 40 nm and dielectric constant of 775. The MCM structure is expected to deliver a maximum charge storage capacity of 109.75 fF for a capacitor in DRAM cell area of 0.64 mu m(2) well above the minimum requirement for DRAM cell. The leakage current density for a variation of voltage from 0 to 10 V has been simulated for temperature variation. When compared with the previous report, the proposed multi layer capacitor (MLC) structure shows promising potentials in terms of dielectric characteristics. 2006 Conference or Workshop Item NonPeerReviewed Balachandran, R and Yow, HK and Manickam, RM and Saaminathan, V (2006) Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application. In: Simulated dielectric characteristics of Pt/BST/Ni-Fe/Cu multilayer capacitor stack for storage application. http://dx.doi.org/10.1109/SMELEC.2006.380792 doi:10.1109/SMELEC.2006.380792 doi:10.1109/SMELEC.2006.380792 |
| spellingShingle | TA Engineering (General). Civil engineering (General) Balachandran, R Yow, HK Manickam, RM Saaminathan, V Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title | Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title_full | Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title_fullStr | Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title_full_unstemmed | Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title_short | Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application |
| title_sort | simulated dielectric characteristics of pt/bst/ni-fe/cu multilayer capacitor stack for storage application |
| topic | TA Engineering (General). Civil engineering (General) |
| url | http://shdl.mmu.edu.my/2051/ http://shdl.mmu.edu.my/2051/ http://shdl.mmu.edu.my/2051/ |