Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application
In this simulation research work, the metal-composite-metal (MCM) multilayer capacitor structure [Pt/BST/Ni-Fe/Cu] is proposed with Barium Strontium Titanate (BST) oxide material as the capacitor dielectric material for DRAM with permalloy Nickel-Ferrous (Ni-Fe) coated Copper (Cu) as the bottom cond...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2051/ |