The first inverter fabrication in UTHM cleanroom using cost effective mask

In MOSFET fabrication process, the process recipe is very important. A good process recipe will produce good MOSFET device. Universiti Tun Hussein Onn Malaysia (UTHM) has setup a cleanroom for ISO Class 100 and Class 1000. However, our cleanroom do not have its own recipe to develop MOSFET device. T...

Full description

Bibliographic Details
Main Authors:	Sahdan, Mohd Zainizan, Saim, Hashim, Ruslan, Siti Hawa, Sanudin, Rahmat, Abd Wahab, Mohd Helmy
Format:	Conference or Workshop Item
Published:	2007
Subjects:	TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/3291/ http://eprints.uthm.edu.my/3291/1/01EEE_04.pdf

id	uthm-3291
recordtype	eprints
spelling	uthm-32912015-01-21T07:40:52Z The first inverter fabrication in UTHM cleanroom using cost effective mask Sahdan, Mohd Zainizan Saim, Hashim Ruslan, Siti Hawa Sanudin, Rahmat Abd Wahab, Mohd Helmy TK7800-8360 Electronics In MOSFET fabrication process, the process recipe is very important. A good process recipe will produce good MOSFET device. Universiti Tun Hussein Onn Malaysia (UTHM) has setup a cleanroom for ISO Class 100 and Class 1000. However, our cleanroom do not have its own recipe to develop MOSFET device. Therefore, it is a challenge for UTHM research group to develop this recipe. In this work, the first attempt to develop a process recipe for nMOS inverter has been done, which involved three stages. The first stage was designing and fabrication of cost effective mask using transparency films with channel length range from 500um to 30um. Then, the second stage was optimizing the process parameters. Finally, the third stage was fabrication of nMOS inverter using Modu-lab fabrication toolset. The nMOS inverter was successfully fabricated and this work becomes a starting point for the UTHM research group to do further research in nanoscale transistor and Microelectromechanical System (MEMS) device. 2007 Conference or Workshop Item PeerReviewed application/pdf http://eprints.uthm.edu.my/3291/1/01EEE_04.pdf Sahdan, Mohd Zainizan and Saim, Hashim and Ruslan, Siti Hawa and Sanudin, Rahmat and Abd Wahab, Mohd Helmy (2007) The first inverter fabrication in UTHM cleanroom using cost effective mask. In: World Engineering Congress 2007, 5-9 August 2007, Penang, Malaysia. http://eprints.uthm.edu.my/3291/
repository_type	Digital Repository
institution_category	Local University
institution	Universiti Tun Hussein Onn Malaysia
building	UTHM Institutional Repository
collection	Online Access
topic	TK7800-8360 Electronics
spellingShingle	TK7800-8360 Electronics Sahdan, Mohd Zainizan Saim, Hashim Ruslan, Siti Hawa Sanudin, Rahmat Abd Wahab, Mohd Helmy The first inverter fabrication in UTHM cleanroom using cost effective mask
description	In MOSFET fabrication process, the process recipe is very important. A good process recipe will produce good MOSFET device. Universiti Tun Hussein Onn Malaysia (UTHM) has setup a cleanroom for ISO Class 100 and Class 1000. However, our cleanroom do not have its own recipe to develop MOSFET device. Therefore, it is a challenge for UTHM research group to develop this recipe. In this work, the first attempt to develop a process recipe for nMOS inverter has been done, which involved three stages. The first stage was designing and fabrication of cost effective mask using transparency films with channel length range from 500um to 30um. Then, the second stage was optimizing the process parameters. Finally, the third stage was fabrication of nMOS inverter using Modu-lab fabrication toolset. The nMOS inverter was successfully fabricated and this work becomes a starting point for the UTHM research group to do further research in nanoscale transistor and Microelectromechanical System (MEMS) device.
format	Conference or Workshop Item
author	Sahdan, Mohd Zainizan Saim, Hashim Ruslan, Siti Hawa Sanudin, Rahmat Abd Wahab, Mohd Helmy
author_facet	Sahdan, Mohd Zainizan Saim, Hashim Ruslan, Siti Hawa Sanudin, Rahmat Abd Wahab, Mohd Helmy
author_sort	Sahdan, Mohd Zainizan
title	The first inverter fabrication in UTHM cleanroom using cost effective mask
title_short	The first inverter fabrication in UTHM cleanroom using cost effective mask
title_full	The first inverter fabrication in UTHM cleanroom using cost effective mask
title_fullStr	The first inverter fabrication in UTHM cleanroom using cost effective mask
title_full_unstemmed	The first inverter fabrication in UTHM cleanroom using cost effective mask
title_sort	first inverter fabrication in uthm cleanroom using cost effective mask
publishDate	2007
url	http://eprints.uthm.edu.my/3291/ http://eprints.uthm.edu.my/3291/1/01EEE_04.pdf
first_indexed	2018-09-05T11:04:45Z
last_indexed	2018-09-05T11:04:45Z
_version_	1610765289063972864

The first inverter fabrication in UTHM cleanroom using cost effective mask

Similar Items