The first inverter fabrication in UTHM cleanroom using cost effective mask
In MOSFET fabrication process, the process recipe is very important. A good process recipe will produce good MOSFET device. Universiti Tun Hussein Onn Malaysia (UTHM) has setup a cleanroom for ISO Class 100 and Class 1000. However, our cleanroom do not have its own recipe to develop MOSFET device. T...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/3291/ http://eprints.uthm.edu.my/3291/1/01EEE_04.pdf |