Detection of Bond Pad Discolorations at Outgoing Wafer Inspections
Deployment of an automatic visual inspection system in semiconductor industry has become increasingly popular than ever not only due to its relatively high value as a yield analysis tool of outgoing products but more importantly for the prevention of defect escapee. A lot of studies are done on the...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers Inc.
2018
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Subjects: | |
Online Access: | http://ir.unimas.my/19916/ http://ir.unimas.my/19916/ http://ir.unimas.my/19916/ http://ir.unimas.my/19916/1/Detection-of-Bond-Pad-Discolorations-at-Outgoing-Wafer-Inspections_2018_IEEE-Transactions-on-Semiconductor-Manufacturing.html |