Structure and optical properties of multi-phase structured amorphous silicon carbon nitride thin films deposited by plasma enhanced chemical vapour deposition / Mohd Azam Abdul Rahman
The amorphous structured silicon carbide (a-SiC) thin films have been the focus of many studies due to its potential applications for high temperature devices operation in complement to conventional silicon microelectronics. Incorporation of nitrogen to silicon carbide thin films, has offered an eff...
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| Format: | Thesis |
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2018
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| Online Access: | http://studentsrepo.um.edu.my/8640/ http://studentsrepo.um.edu.my/8640/1/Mohd_Azam.pdf http://studentsrepo.um.edu.my/8640/2/Mohd_Azam_Thesis_Final.pdf |