Modeling of metastable phase formation diagrams for sputtered thin films
A method to model the metastable phase formation in the Cu–W system based on the critical surface diffusion distance has been developed. The driver for the formation of a second phase is the critical diffusion distance which is dependent on the solubility of W in Cu and on the solubility of Cu in W....
| Main Authors: | , , , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Taylor & Francis
2016
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5101876/ |