Monitoring the thin film formation during sputter deposition of vanadium carbide

Monitoring the thin film formation during sputter deposition of vanadium carbide

The theoretical description and the experimental realisation of in situ X-ray reflectivity measurements during thin film deposition of polycrystalline vanadium carbide coatings are presented.

Bibliographic Details
Main Authors: Kaufholz, Marthe, Krause, Bärbel, Kotapati, Sunil, Köhl, Martin, Mantilla, Miguel F., Stüber, Michael, Ulrich, Sven, Schneider, Reinhard, Gerthsen, Dagmar, Baumbach, Tilo
Format: Online
Language:English
Published: International Union of Crystallography 2015
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4294025/

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4294025/

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