Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO

Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO

To determine the planar motion of a 6-DOF precision stage, a measurement system based on three Hall sensors is adopted to obtain the X, Y, Rz motions of the stage. The machining and assembly errors in the actual mechanical system, which are difficult to measure directly, cause the parameters in the...

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Main Authors: Chen, Zhenyu, Liu, Yang, Fu, Zhenxian, Song, Shenmin, Tan, Jiubin
Format: Online
Language:English
Published: MDPI 2016
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934298/
id pubmed-4934298
recordtype oai_dc
spelling pubmed-49342982016-07-06 Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO Chen, Zhenyu Liu, Yang Fu, Zhenxian Song, Shenmin Tan, Jiubin Article To determine the planar motion of a 6-DOF precision stage, a measurement system based on three Hall sensors is adopted to obtain the X, Y, Rz motions of the stage. The machining and assembly errors in the actual mechanical system, which are difficult to measure directly, cause the parameters in the model of the Hall measurement system to deviate from their designed values. Additionally, the vertical movement of the stage will render the measurement model nonlinear. To guarantee the accuracy of the measurement, the parameters in the measurement model should be estimated and the nonlinearity compensated. In this paper, a novel approach based on self-adaptive hybrid TLBO (teaching-learning-based-optimization) is proposed to estimate the parameters in the Hall measurement model. The influences of zero deviations and vertical movements on the measurement accuracy are analyzed and compensated. The effectiveness of the proposed method is validated by experimental results obtained on a 6-DOF precision stage. Thanks to parameter estimation and calibration, the measurement error of the Hall sensor array is reduced to 6 micrometers. MDPI 2016-06-14 /pmc/articles/PMC4934298/ /pubmed/27314349 http://dx.doi.org/10.3390/s16060872 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
repository_type Open Access Journal
institution_category Foreign Institution
institution US National Center for Biotechnology Information
building NCBI PubMed
collection Online Access
language English
format Online
author Chen, Zhenyu
Liu, Yang
Fu, Zhenxian
Song, Shenmin
Tan, Jiubin
spellingShingle Chen, Zhenyu
Liu, Yang
Fu, Zhenxian
Song, Shenmin
Tan, Jiubin
Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
author_facet Chen, Zhenyu
Liu, Yang
Fu, Zhenxian
Song, Shenmin
Tan, Jiubin
author_sort Chen, Zhenyu
title Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
title_short Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
title_full Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
title_fullStr Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
title_full_unstemmed Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO
title_sort calibration of the hall measurement system for a 6-dof precision stage using self-adaptive hybrid tlbo
description To determine the planar motion of a 6-DOF precision stage, a measurement system based on three Hall sensors is adopted to obtain the X, Y, Rz motions of the stage. The machining and assembly errors in the actual mechanical system, which are difficult to measure directly, cause the parameters in the model of the Hall measurement system to deviate from their designed values. Additionally, the vertical movement of the stage will render the measurement model nonlinear. To guarantee the accuracy of the measurement, the parameters in the measurement model should be estimated and the nonlinearity compensated. In this paper, a novel approach based on self-adaptive hybrid TLBO (teaching-learning-based-optimization) is proposed to estimate the parameters in the Hall measurement model. The influences of zero deviations and vertical movements on the measurement accuracy are analyzed and compensated. The effectiveness of the proposed method is validated by experimental results obtained on a 6-DOF precision stage. Thanks to parameter estimation and calibration, the measurement error of the Hall sensor array is reduced to 6 micrometers.
publisher MDPI
publishDate 2016
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934298/
_version_ 1613604863192596480

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