High-bandwidth multimode self-sensing in bimodal atomic force microscopy
Using standard microelectromechanical system (MEMS) processes to coat a microcantilever with a piezoelectric layer results in a versatile transducer with inherent self-sensing capabilities. For applications in multifrequency atomic force microscopy (MF-AFM), we illustrate that a single piezoelectric...
| Main Authors: | , |
|---|---|
| Format: | Online |
| Language: | English |
| Published: |
Beilstein-Institut
2016
|
| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4778537/ |