Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers

Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers

AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ...

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Main Authors: Li, Nan, Yadav, Satyesh K., Wang, Jian, Liu, Xiang-Yang, Misra, Amit
Format: Online
Language:English
Published: Nature Publishing Group 2015
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683522/
id pubmed-4683522
recordtype oai_dc
spelling pubmed-46835222015-12-21 Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers Li, Nan Yadav, Satyesh K. Wang, Jian Liu, Xiang-Yang Misra, Amit Article AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN. Nature Publishing Group 2015-12-18 /pmc/articles/PMC4683522/ /pubmed/26681109 http://dx.doi.org/10.1038/srep18554 Text en Copyright © 2015, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
repository_type Open Access Journal
institution_category Foreign Institution
institution US National Center for Biotechnology Information
building NCBI PubMed
collection Online Access
language English
format Online
author Li, Nan
Yadav, Satyesh K.
Wang, Jian
Liu, Xiang-Yang
Misra, Amit
spellingShingle Li, Nan
Yadav, Satyesh K.
Wang, Jian
Liu, Xiang-Yang
Misra, Amit
Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
author_facet Li, Nan
Yadav, Satyesh K.
Wang, Jian
Liu, Xiang-Yang
Misra, Amit
author_sort Li, Nan
title Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
title_short Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
title_full Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
title_fullStr Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
title_full_unstemmed Growth and Stress-induced Transformation of Zinc blende AlN Layers in Al-AlN-TiN Multilayers
title_sort growth and stress-induced transformation of zinc blende aln layers in al-aln-tin multilayers
description AlN nanolayers in sputter deposited {111}Al/AlN/TiN multilayers exhibit the metastable zinc-blende-structure (z-AlN). Based on density function theory calculations, the growth of the z-AlN is ascribed to the kinetically and energetically favored nitridation of the deposited aluminium layer. In situ nanoindentation of the as-deposited {111}Al/AlN/TiN multilayers in a high-resolution transmission electron microscope revealed the z-AlN to wurzite AlN phase transformation through collective glide of Shockley partial dislocations on every two {111} planes of the z-AlN.
publisher Nature Publishing Group
publishDate 2015
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4683522/
_version_ 1613514193836703744

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