Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
► AlN and TiN layers are always in tension and compression at interface, respectively. ► Curvature of the bending is largest for the TiN/AlN thickness ratios ∼0.5 and ∼2. ► Curvature is maximum for equal number of TiN and AlN layers in multilayer film. ► Curvature is decreases with increasing the no...
| Main Authors: | , , |
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| Format: | Online |
| Language: | English |
| Published: |
Elsevier Science Pub. Co
2012
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4986319/ |