Optical probe for surface and subsurface defects induced by ion bombardment
We demonstrate that reflectance difference spectroscopy (RDS) is sensitive to defects induced by ion bombardment, located either in the topmost layer or in the subsurface region. Most importantly, these two kinds of defects can be spectrally discriminated, since the corresponding signatures in the R...
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| Format: | Online |
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WILEY-VCH Verlag
2013
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461859/ |
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pubmed-44618592015-06-16 Optical probe for surface and subsurface defects induced by ion bombardment Sun, L D Hohage, M Zeppenfeld, P Rapid Research Letters We demonstrate that reflectance difference spectroscopy (RDS) is sensitive to defects induced by ion bombardment, located either in the topmost layer or in the subsurface region. Most importantly, these two kinds of defects can be spectrally discriminated, since the corresponding signatures in the RD spectrum arise from perturbations of different types of electronic states: The defects in the topmost surface layer mainly lead to a quenching of the optical anisotropy related to surface states, whereas the subsurface defects strongly affect the optical anisotropy originating from transitions between surface-modified bulk electronic states. Consequently, RDS can be used to simultaneously monitor the defects in the topmost surface layer and in the subsurface region in-situ during ion bombardment and thermal annealing. WILEY-VCH Verlag 2013-04 2013-03-05 /pmc/articles/PMC4461859/ /pubmed/26089989 http://dx.doi.org/10.1002/pssr.201307088 Text en Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim http://creativecommons.org/licenses/by/2.5/ Re-use of this article is permitted in accordance with the Creative Commons Deed, Attribution 2.5, which does not permit commercial exploitation. |
| repository_type |
Open Access Journal |
| institution_category |
Foreign Institution |
| institution |
US National Center for Biotechnology Information |
| building |
NCBI PubMed |
| collection |
Online Access |
| language |
English |
| format |
Online |
| author |
Sun, L D Hohage, M Zeppenfeld, P |
| spellingShingle |
Sun, L D Hohage, M Zeppenfeld, P Optical probe for surface and subsurface defects induced by ion bombardment |
| author_facet |
Sun, L D Hohage, M Zeppenfeld, P |
| author_sort |
Sun, L D |
| title |
Optical probe for surface and subsurface defects induced by ion bombardment |
| title_short |
Optical probe for surface and subsurface defects induced by ion bombardment |
| title_full |
Optical probe for surface and subsurface defects induced by ion bombardment |
| title_fullStr |
Optical probe for surface and subsurface defects induced by ion bombardment |
| title_full_unstemmed |
Optical probe for surface and subsurface defects induced by ion bombardment |
| title_sort |
optical probe for surface and subsurface defects induced by ion bombardment |
| description |
We demonstrate that reflectance difference spectroscopy (RDS) is sensitive to defects induced by ion bombardment, located either in the topmost layer or in the subsurface region. Most importantly, these two kinds of defects can be spectrally discriminated, since the corresponding signatures in the RD spectrum arise from perturbations of different types of electronic states: The defects in the topmost surface layer mainly lead to a quenching of the optical anisotropy related to surface states, whereas the subsurface defects strongly affect the optical anisotropy originating from transitions between surface-modified bulk electronic states. Consequently, RDS can be used to simultaneously monitor the defects in the topmost surface layer and in the subsurface region in-situ during ion bombardment and thermal annealing. |
| publisher |
WILEY-VCH Verlag |
| publishDate |
2013 |
| url |
https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461859/ |
| _version_ |
1613233788680142848 |