Optical probe for surface and subsurface defects induced by ion bombardment
We demonstrate that reflectance difference spectroscopy (RDS) is sensitive to defects induced by ion bombardment, located either in the topmost layer or in the subsurface region. Most importantly, these two kinds of defects can be spectrally discriminated, since the corresponding signatures in the R...
| Main Authors: | , , |
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| Format: | Online |
| Language: | English |
| Published: |
WILEY-VCH Verlag
2013
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4461859/ |