Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...

Full description

Bibliographic Details
Main Authors:	Hu, Yu-Chih, Dai, Ching-Liang, Hsu, Cheng-Chih
Format:	Online
Language:	English
Published:	MDPI 2014
Online Access:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003938/

id	pubmed-4003938
recordtype	oai_dc
spelling	pubmed-40039382014-04-29 Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip Hu, Yu-Chih Dai, Ching-Liang Hsu, Cheng-Chih Article A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the sol-gel method. The titanium dioxide is coated on the interdigitated electrodes. The humidity sensor requires a post-process to remove the sacrificial layer and to coat the titanium dioxide. The resistance of the sensor changes as the sensitive film absorbs or desorbs vapor. The readout circuit is employed to convert the resistance variation of the sensor into the output voltage. The experimental results show that the integrated humidity sensor has a sensitivity of 4.5 mV/RH% (relative humidity) at room temperature. MDPI 2014-03-03 /pmc/articles/PMC4003938/ /pubmed/24594612 http://dx.doi.org/10.3390/s140304177 Text en © 2014 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
repository_type	Open Access Journal
institution_category	Foreign Institution
institution	US National Center for Biotechnology Information
building	NCBI PubMed
collection	Online Access
language	English
format	Online
author	Hu, Yu-Chih Dai, Ching-Liang Hsu, Cheng-Chih
spellingShingle	Hu, Yu-Chih Dai, Ching-Liang Hsu, Cheng-Chih Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
author_facet	Hu, Yu-Chih Dai, Ching-Liang Hsu, Cheng-Chih
author_sort	Hu, Yu-Chih
title	Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
title_short	Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
title_full	Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
title_fullStr	Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
title_full_unstemmed	Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
title_sort	titanium dioxide nanoparticle humidity microsensors integrated with circuitry on-a-chip
description	A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the sol-gel method. The titanium dioxide is coated on the interdigitated electrodes. The humidity sensor requires a post-process to remove the sacrificial layer and to coat the titanium dioxide. The resistance of the sensor changes as the sensitive film absorbs or desorbs vapor. The readout circuit is employed to convert the resistance variation of the sensor into the output voltage. The experimental results show that the integrated humidity sensor has a sensitivity of 4.5 mV/RH% (relative humidity) at room temperature.
publisher	MDPI
publishDate	2014
url	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003938/
_version_	1612083405753679872

Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

Similar Items