Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...
| Main Authors: | , , |
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| Format: | Online |
| Language: | English |
| Published: |
MDPI
2014
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003938/ |