In situ growth optimization in focused electron-beam induced deposition
We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the...
| Main Authors: | , , , |
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| Format: | Online |
| Language: | English |
| Published: |
Beilstein-Institut
2013
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| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869208/ |