Focused electron beam induced deposition: A perspective
Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron b...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Online |
| Language: | English |
| Published: |
Beilstein-Institut
2012
|
| Online Access: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3458607/ |