Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotub...

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Bibliographic Details
Main Authors: Dai, Ching-Liang, Chen, Yen-Chi, Wu, Chyan-Chyi, Kuo, Chin-Fu
Format: Online
Language:English
Published: Molecular Diversity Preservation International (MDPI) 2010
Online Access:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264449/

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264449/

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